A Kanni Raj

Micromechatronics A Kanni Raj

MICROMECHATRONICS: Micro Electro Mechanical Systems - discusses MEMS as M. E. degree level subject. The book introduces the most accepted MEMS concepts such as design, fabrication and devices. The book is divided into 3 chapters and is intended mainly to serve as a textbook for ME (Mechatronics Engineering) and as reference book for BE (Mechanical, Automobile & Aeronautical). Again to say, It is my hope that book will become an invaluable source of essential information for academicians, industrialists and governmental researchers working in MEMS.