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![Cover for M. Elwenspoek · Mechanical Microsensors - Microtechnology and MEMS (Paperback Book) [Softcover reprint of hardcover 1st ed. 2001 edition] (2010)](https://imusic.b-cdn.net/images/item/original/066/9783642087066.jpg?m-elwenspoek-2010-mechanical-microsensors-microtechnology-and-mems-paperback-book&class=scaled&v=1502238260)
![Cover for M. Elwenspoek · Mechanical Microsensors - Microtechnology and MEMS (Hardcover Book) [2001 edition] (2000)](https://imusic.b-cdn.net/images/item/original/822/9783540675822.jpg?m-elwenspoek-2000-mechanical-microsensors-microtechnology-and-mems-hardcover-book&class=scaled&v=1608696007)