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The Physics of Submicron Lithography - Microdevices Kamil A. Valiev 1992 edition
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The Physics of Submicron Lithography - Microdevices
Kamil A. Valiev
In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.
493 pages, biography
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 31 de marzo de 1992 |
| ISBN13 | 9780306435782 |
| Editores | Springer Science+Business Media |
| Páginas | 493 |
| Dimensiones | 178 × 254 × 25 mm · 1,09 kg |
| Lengua | Inglés |
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