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Analysis and Design Principles of MEMS Devices Bao, Minhang (Department of Microelectronics, Fudan University, Shanghai, CHINA)
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Analysis and Design Principles of MEMS Devices
Bao, Minhang (Department of Microelectronics, Fudan University, Shanghai, CHINA)
Sensors and actuators are part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. This book presents the analysis and design principles of MEMS devices.
328 pages, illustrations
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 1 de mayo de 2005 |
| ISBN13 | 9780444516169 |
| Editores | Elsevier Science & Technology |
| Páginas | 328 |
| Dimensiones | 188 × 262 × 23 mm · 752 g |
