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Ion Implantation: Basics to Device Fabrication - The Springer International Series in Engineering and Computer Science Emanuele Rimini Softcover reprint of the original 1st ed. 1995 edition
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Ion Implantation: Basics to Device Fabrication - The Springer International Series in Engineering and Computer Science
Emanuele Rimini
Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics.
406 pages, biography
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 23 de febrero de 2014 |
| ISBN13 | 9781461359524 |
| Editores | Springer-Verlag New York Inc. |
| Páginas | 393 |
| Dimensiones | 155 × 235 × 21 mm · 566 g |
| Lengua | Inglés |
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