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Advanced MEMS / NEMS Fabrication and Sensors 2022 edition
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Advanced MEMS / NEMS Fabrication and Sensors
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.
312 pages, 75 Tables, color; 157 Illustrations, color; 10 Illustrations, black and white; VI, 312 p.
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 13 de octubre de 2022 |
| ISBN13 | 9783030797515 |
| Editores | Springer Nature Switzerland AG |
| Páginas | 312 |
| Dimensiones | 150 × 220 × 10 mm · 583 g |
| Lengua | Alemán |
| Editor | Yang, Zhuoqing |
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