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Ion Implantation and Annealing Applications, Science and Technology: Contributions from IIT School, Edition 2024 - Topics in Applied Physics
Ion Implantation and Annealing Applications, Science and Technology: Contributions from IIT School, Edition 2024 - Topics in Applied Physics
It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology.
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 30 de mayo de 2026 |
| ISBN13 | 9783032100078 |
| Editores | Springer Nature Switzerland AG |
| Páginas | 628 |
| Dimensiones | 150 × 220 × 20 mm · 1,11 kg |
| Lengua | Alemán |
| Editor | Current, Michael |
| Editor | Lerch, Wilfried |
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