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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metalli Maria Angela Pampillon Arce 1st ed. 2017 edition
Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metalli
Maria Angela Pampillon Arce
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.
164 pages, 6 Tables, color; 6 Illustrations, color; 110 Illustrations, black and white; XXIII, 164 p
| Medios de comunicación | Libros Book |
| Publicado | 13 de octubre de 2017 |
| ISBN13 | 9783319666068 |
| Editores | Springer International Publishing AG |
| Páginas | 164 |
| Dimensiones | 150 × 220 × 20 mm · 444 g |
| Lengua | Alemán |
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