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Thin Film Analysis by X-Ray Scattering Birkholz, Mario (IHP Microelectronics, Frankfurt / Oder, Germany)
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Thin Film Analysis by X-Ray Scattering
Birkholz, Mario (IHP Microelectronics, Frankfurt / Oder, Germany)
With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of thin films.
378 pages, Illustrations
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 15 de noviembre de 2005 |
| ISBN13 | 9783527310524 |
| Editores | Wiley-VCH Verlag GmbH |
| Páginas | 378 |
| Dimensiones | 170 × 248 × 26 mm · 766 g |
| Lengua | Inglés |
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