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System-level Modeling of MEMS - Advanced Micro and Nanosystems Tamara Bechtold
System-level Modeling of MEMS - Advanced Micro and Nanosystems
Tamara Bechtold
System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations.
562 pages, Illustrations
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 6 de febrero de 2013 |
| ISBN13 | 9783527319039 |
| Editores | Wiley-VCH Verlag GmbH |
| Páginas | 562 |
| Dimensiones | 175 × 244 × 32 mm · 1,32 kg |
| Lengua | Inglés |
| Editor | Brand, Oliver |
| Editor | Fedder, Gary K. |
| Editor | Hierold, Christofer |
| Editor | Korvink, Jan G. |
| Editor | Tabata, Osamu |
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