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Low Dielectric Constant Materials for IC Applications - Springer Series in Advanced Microelectronics Paul S Ho 2003 edition
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Low Dielectric Constant Materials for IC Applications - Springer Series in Advanced Microelectronics
Paul S Ho
Low dielectric constant materials are an important component of microelectronic devices. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials, Metrology and characterization techniques, Integration, Reliability.
329 pages, biography
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 14 de noviembre de 2002 |
| ISBN13 | 9783540678199 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 310 |
| Dimensiones | 155 × 235 × 19 mm · 594 g |
| Lengua | Alemán |
| Editor | Ho, Paul S. |
| Editor | Lee, Wei William |
| Editor | Leu, Jihperng |
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