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Reactive Sputter Deposition - Springer Series in Materials Science Softcover reprint of hardcover 1st ed. 2008 edition
Reactive Sputter Deposition - Springer Series in Materials Science
In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process.
590 pages, 336 black & white illustrations, 5 colour illustrations, 37 black & white tables
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 25 de noviembre de 2010 |
| ISBN13 | 9783642095368 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 572 |
| Dimensiones | 155 × 235 × 31 mm · 885 g |
| Lengua | Alemán |
| Editor | Depla, Diederik |
| Editor | Mahieu, Stijn |
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