Daniil Abdullaev

Primenenie Ionno-luchevogo Travleniya Pri Udalenii Passivatsii Mikroskhem: Ispol'zovanie V Ramkakh Tekhnologii Analiza Otkazov Integral'nykh ... Posloynogo Preparirovaniya Daniil Abdullaev Russian edition

V dannoy rabote privedyen analiticheskiy obzor otechestvennoy i zarubezhnoy literatury po metodu sukhogo vakuumnogo travleniya materialov, predstavlen obzor primenyaemoy metodiki issledovaniya. V rabote predstavleny rezul'taty optimizatsii protsessov reaktivno-ionnogo plazmennogo i ionno-luchevogo travleniya passivatsionnykh sloyev integral'nykh mikroskhem v ramkakh tekhnologii analiza otkazov. V organizatsionno-ekonomicheskoy chasti predstavleny raschyety stoimosti i tselesoobraznosti dannykh issledovaniy. Rezul'tatom provedyennoy raboty stala novaya metodika udaleniya passivatsionnykh sloyev integral'nykh mikroskhem v ramkakh tekhnologii analiza otkazov, otlichayushchayasya ot sushchestvuyushchikh vysokoy stepen'yu planarizatsii poverkhnosti kristalla integral'noy skhemy pri minimal'nom povrezhdenii mezhsloynogo dielektrika.