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Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems Jingmin Li
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Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems
Jingmin Li
This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS).
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 24 de abril de 2026 |
| ISBN13 | 9789819547579 |
| Editores | Springer Verlag, Singapore |
| Páginas | 349 |
| Dimensiones | 150 × 220 × 20 mm · 775 g |
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