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Extreme Ultraviolet Lithography Banqiu Wu Ed edition
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Extreme Ultraviolet Lithography
Banqiu Wu
Explains the most promising innovation in microlithography today
482 pages, black & white illustrations, black & white tables, figures
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 16 de mayo de 2009 |
| ISBN13 | 9780071549189 |
| Editores | McGraw-Hill Education - Europe |
| Páginas | 482 |
| Dimensiones | 160 × 239 × 30 mm · 784 g |
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