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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications David Attwood
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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications
David Attwood
This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.
504 pages, 255 b/w illus.
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 22 de febrero de 2007 |
| ISBN13 | 9780521029971 |
| Editores | Cambridge University Press |
| Páginas | 504 |
| Dimensiones | 180 × 253 × 27 mm · 1,04 kg (Peso (estimado)) |
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